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Australian Centre for Precision Optics
Ion Assisted Deposition
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We run two 600mm and one 750mm diameter IAD systems capable
of depositing multilayer coatings up to ~100 layers. Features
of the deposition systems include:
- Multicrucible electron beam evaporation.
- Thermal evaporation.
- 2000 wavelength reflectance or transmittance monitoring.
- Precision multiwavelength ellipsometric monitoring.
- Large current, medium energy (50-250eV) inert and/or
reactive gas ion beam assistance.
- Low substrate temperature deposition.
- On-site reoptimisation of coating design.
- 100% water stable filters.
Diagram on the principle of IAD
Hollow Cathode Ion Gun
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Contact:
Ms Katie Green
Materials and Fabrication Manager
Phone: +61 2 9413 7620
fax: +61 2 9413 7200
Email:acpo
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ACPO is a fully owned centre of CSIRO, Australia's
most trusted and respected science and technology research organisation. |
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Last updated by Peter Saunders
7 February, 2012
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