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Australian Centre for Precision Optics
Metrology Capabilities
Testing and Certification
- Surface form with calibration accuracy better than 5
nm over scales from <1 mm to 300 mm.
- Surface roughness calibration to 0.1 nm.
- Inspection of optical properties of materials.
- Roundness, mechanical dimensional certification and
measurement.
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Large Aperture Digital Interferometer (LADI) performance/specifications
- Short term repeatability over 320 mm aperture = 0.5 nm.
- Measurement reproducibility: ± 3.5 nm (mostly power
term) over 320 mm aperture; ± 1.0 nm over 150 mm aperture.
- Spatial frequency response 1.5/mm to 0.0031/mm.
- Customisable phase-shifting algorithms e.g. error compensating
7 samples, tunable multi-surface (e.g. 32 samples).
- • Aperture extendable beyond 320 mm by stitching software.
Example Specifications
- ETM radius 7.4 km ± 220 metres (675 nm sag with ±
20 nm uncertainty).
- Astigmatism < 10 nm P-V.
- RMS surface errors (power and astig. removed):
- < 1.6 nm, spatial frequencies < 4.3 cm-1
- < 0.2 nm, spatial frequencies 4.3 - 7,500 cm-1
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Contact:
Ms Katie Green
Materials and Fabrication Manager
Phone: +61 2 9413 7620
fax: +61 2 9413 7200
Email:acpo
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ACPO is a fully owned centre of CSIRO, Australia's
most trusted and respected science and technology research organisation. |
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Last updated by Peter Saunders
7 February, 2012
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