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Australian Centre for Precision Optics
Microlithography
Microlithography optics are used in the production of
microchips and boards which require extremely fine yet accurate
etchings. An ultraviolet light source is directed onto a
wafer via microlithography stepper systems to etch images
onto the surface. A wafer stepper objective may contain
two prisms and one lens. The material typically used is
calcium fluoride which has an infamous reputation of being
a difficult material to work with. |
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Typical Wafer Stepper Objective Specification
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Material: |
Calcium Fluoride
Lithium Fluoride
Fused Silica |
Flatness: |
< lambda/40 |
Coatings: |
Ultraviolet (250 nm) high reflectivity and anti-reflection
coatings. |
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Contact:
Ms Katie Green
Materials and Fabrication Manager
Phone: +61 2 9413 7620
fax: +61 2 9413 7200
Email:acpo
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ACPO is a fully owned centre of CSIRO, Australia's
most trusted and respected science and technology research organisation. |
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Last updated by Peter Saunders
16 August, 2007
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