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Home > Products & Services > Optical Fabrication > Microlithography

Microlithography

 

Microlithography optics are used in the production of microchips and boards which require extremely fine yet accurate etchings. An ultraviolet light source is directed onto a wafer via microlithography stepper systems to etch images onto the surface. A wafer stepper objective may contain two prisms and one lens. The material typically used is calcium fluoride which has an infamous reputation of being a difficult material to work with.

Microlithography Steppers

 

Typical Wafer Stepper Objective Specification

Material:

Calcium Fluoride
Lithium Fluoride
Fused Silica

Flatness:

< lambda/40

Coatings:

Ultraviolet (250 nm) high reflectivity and anti-reflection coatings.

Contact:
Ms Katie Green
Materials and Fabrication Manager
Phone: +61 2 9413 7620
fax: +61 2 9413 7200
Email:acpo

 
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Last updated by Peter Saunders 16 August, 2007

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